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Resolution: up to 2 (nm) vertical
Measuring speed: up to 100fps
Measuring principle: Confocal,High-performance LED (505nm / white)
Other: Collision detection in xyz direction
Power supplied: 100 - 240 V
Surface parameters: ISO 4287, ISO 13565, ISO 25178, …
Positioning volume x: 100 mm
Positioning volume y: 100 mm
Positioning volume z: 70 mm
Supplied with:
• Confocal measuring head
–HDR camera (B/W or color camera)
–4x lens revolver with identification
• L-tripod including control electronics
• Motorized XY table (100x100 mm) with glass
scales
• Motorized Z-axis (70 mm) with glass
measuring scale
• Measuring system computer with 24” TFT monitor
• Objective lenses:
–5x to 100x selectable
• MarSurf MSW
• MarSurf ASW
• MarSurf MfM
