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Resolution: Measuring range 1: 7.6 nm
Measuring range 2: 0.76 nm
Start of traversing length (in X):0 mm
Probe arm length: 45 mm (x 1),67.5 mm (x 1,5),90 mm (x 2),112.5 mm (x 2,5),135 mm (x 3)
End of traversing length (in X):140 mm
350 mm Z-axis
Positioning speed: 0.02 – 200 mm/s (in X)
Guide deviation:0.07 µm / 20 mm,0.2 µm / 60 mm,0.4 µm / 140 mm
Measuring speed: Up to 10 mm/s
Measuring range: 500 µm (±250 µm) for probe arm length 45 mm
1500 µm (±750 µm) for probe arm length 135 mm
ACCESSORIES
Optional
• Manual control panel with joystick and display
• Motor-driven TY axis
• Parallel vice
• Prism block
• Equipment table
• Vibration damping system
General software options
• Option - RoughnessPLus
• Option - MeasurementPlus
• Option - Dominant Waviness (WDc) for MarWin
• Option - ISO 13565-3 surface parameters
• Option - QS-STAT / QS-STAT Plus
• Option - Profile processing
• Option - User-defined parameters
• Option - Topography
