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Drive method: X axis/Y axis/Z axis : CNC
Optical Magnification: Zoom: 0.75X-5.25X (in 8steps)
Measuring range (X×Y×Z): 8"× 10"× 4"(200×250×100mm)
Resolution/Length standard: 0.1μm/Linear encoder
Image detecting unit: 1/3" Color CMOS camera
Indication accuracy
X, Y (2.5+6L/1000)µm
Z (5.0+6L/1000)µm
Operating temperature range: 20±1°C
Drive speed: Max 80mm/s
Acceleration and deceleration: Max 250mm/s2
Stage glass size: 11"× 12"(269×311mm)
Maximum stage loading: 22 lbs (10kg)
Illumination:
Stage light: 12V/30W Halogen
Co-axial light: 12V/50W Halogen
Ring fiber light: 12V/100W Halogen
Dimensions (W×D×H)mm: 18"× 32"× 26"(465×815×663mm)
Mass: 169 lbs (76kg)
Power consumption: 500W at max
