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Full Scale Pressure Ranges: 1 Torr
Resolution: 0.001% Full Scale
Accuracy:
8 mT: ±0.5% of Reading
5 mT: ±0.7% of Reading
3 mT: ±0.8% of Reading
2 mT: ±1.0% of Reading
1 mT3: : ±1.5% of Reading
Temperature Coefficients:
- Span: 0.02% Reading/°C
Response Time
- Pressure: 12 ms nominal (10-90% of a step response)
influenced by step size and digital pressure filter setting
- EtherCAT: Refresh Rate 1 ms
Ambient Operating Temperature: 15° to 60°C (15-40 for 45°C
manometer)
Internal Volume: 6.3 cm3 typical.
Warmup Time: 4 hours
Overpressure Limit: 45 psia (310 kPA)
Materials Exposed to Process Gases: Inconel® and Incoloy®
nickel alloys (Fittings 300 Series Stainless Steel)
Input Power:
±15 VDC ±5% @ 700 mA max
Output Signal: Digital EtherCAT
Electrical Connectors:
- Power: 15-pin D-subminiature male
- EtherCAT: Two (2) RJ45 female receptacles for incoming and network signals
Connection Fittings: 0.50'' OD tube, 8 VCR Female, 8 VCR Male, NW16-KF, NW25-KF, Mini-CF 1.33''
Compliance: CE, UKCA
For specific range please check the attachment
below!
