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Measuring range (mm): 400 × 300 × 200
Machine size (mm): 794 × 963 × 1660
Weight (kg): 656
Max. load (kg): 30
X-Y axis accuracy: 2.5 + L/200 µm
Z-axis accuracy: 5 + L/200 µm
XYZ resolution: 0.001 mm
Repeatability (mm): 0.005
Moving speed (mm/s): X-Y: 200, Z: 100
Magnification:
– Optical zoom ratio: 0.7–4.5X
– Image zoom ratio: 44–258X
Control system: Fully closed-loop control
Operation mode: Software & Joystick
