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Temperature range: -20℃ to +20℃
Control accuracy (*): ±2.0 to 3.0℃, Compressor On-Off control
Cooling capacity: Circulation temperature at -10℃: 5.7/6.1 kW
Compressor output, Refrigerant: 5.5 kW, R404A
Pumping capacity: Max. discharge pressure [MPa] 0.57
Flow rate [L/min] 40 (at 0.3 MPa)
Motor output [kW] 0.75
Heating medium (Circulating fluid): Heating medium for low temp.
Required primary cooling water rate [L/min] (*2): 80 (cooling water temperature: +30℃)
Safety device/function: Short/Over current breaker, Phase-reversal relay, Refrigerant high pressure, Refrigerator overload, Compressor heating, Circulating fluid high temperature, Pump overload, Circulating flow reduction
Connecting pipe diameter (Circulating fluid in/out): Rc1
Dimensions (W×D×H): 756 × 1021 × 1582 mm
Weight: approx. 400 kg
Power Supply (three phase AC 200 V, 50/60 Hz): 75 A
Operation current (50/60 Hz): 30 A
(*)There may be a case where the temperature performance cannot be maintained due to environmental temperature, heat load, circulation pipe distance, etc.
(*2)Capacity of water-cooled type varies with the water temperature. Please note it may cause a defect if the flow rate does not increase at high temperature, so please confirm if the required flow rate is secured in advance.
•The specifications described when using Antifreeze (Show Brine Blue).
Applications
●The cooling for Processing machinery, Semiconductor manufacturing equipment, etc.
●Temperature control for Etching equipment
