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Power: 3.5 KW
Furnace tube size(mm): Dia 60(OD) X1200mm
Dimension: 1300X420X1200
Power supply voltage: 220V
Phase number: Single-phase
Temperature control mode
1.Yudian temperature control: 30 sections can only use PID temperature regulation.
2.FP93 temperature control (from Japan)
Trigger: Phase-shift trigger
SCR: 106 / 16E Germany Simon Kang
Max temperature: 1200 ° C
Rated temperature: 1100 ℃
Heating rate: ≤30 ℃/ Min (Available upon request modification)
Control accuracy: +/- 1 ℃
Recommended heating rate: ≤15℃/ Min
Heating length: 400mm
Thermocouple Type: K type
Certification: CE
Surrounding surface temperature: ≤45℃
Turn the motor power: 40W
Electric putter power: 40W
Furnace can be tilted angle: -10 ~30 degrees
Tube rotation rate: Continuously variable motor speed can be adjustable in 1-25 rev / min
Plasma RF Power
Power output range: 0-500W
Maximum reflected power: 10W
Signal frequency: 13.56MHZ ± 0.005%
Noise: <30 dB
Air cooling: cooling method
Input Power: 208-240V 50 / 60HZ
GX supply system main parameters
Standard range: Proton flow controller 5,10,20,30,50,100,200,300,500SCCM,
1,2,3,5,10SLM
(you can choose any scale)
Accuracy: ± 1.5%
Pressure drop: <0.01MPa
Repeatability: ± 0.2% F.S
Max Operating pressure: 3MP
VS-0.1 exhaust system
Power supply: 220V / 380V 380W
Pumping rate: 2L / S
Resistance vacuum gauge: ZDR-I
Vacuum measurement range: 0.1-10 5 Pa
Vacuum pump: VRD-8
Corrugated pipe: KF25X1000mm
Vacuum system: 10 -1Pa
