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Target Gas: Hydrogen, Arsine, Diborane, Silane, Phosphine
Sensor Type: Hot-wire semiconductor
Sampling Method: Internal Pump
Detectable Leak Rate:
H₂: 5.07 × 10⁻⁷ Pa·m³/s
AsH₃: 2.53 × 10⁻⁷ Pa·m³/s
B₂H₆: 1.01 × 10⁻⁷ Pa·m³/s
SiH₄: 2.53 × 10⁻⁷ Pa·m³/s
PH₃: 1.52 × 10⁻⁷ Pa·m³/s
Detectable Gas Concentration:
H₂: 1.0ppm
AsH₃: 0.5ppm
B₂H₆: 0.2ppm
SiH₄: 0.5ppm
PH₃: 0.3ppm
Response Time: 10 sec.
Power Source: 2 × AAA alkaline batteries, approx. 12 hours
Operating Pressure: Atmospheric pressure (800 to 1100hPa)
Operating Temperature & Humidity: 0 to 40°C; 30 to 85%RH
Dimensions: W38 × H135 × D32mm
Weight: Approx. 190g
Accessories: Soft case, drain filter, filter element, gas probe, dust filter, hand strap, 2 × AA alkaline batteries
