Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Flow range: 10SLM, 20SLM
Gases: H2
Valve type: NC: Normally close
Flow rate control range: 5～100％ F.S.(Excluding Mass Flow Meter)
Accuracy: ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃)
Setting signal: 0.25～5VDC
Output signal: 0～5VDC
Repeatability: ±0.2％ F.S
Response: Depends on MFC selected.
Operating differential pressure: Depends on MFC selected.
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃ (Accuracy guaranteedbetween 15～35℃), ≦85％RH (No condensation permitted)
Leak integrity: 1×10-7Pa･m3/sec He
Drive power source: 100-240VAC: ≦500mA
Communication: Analog: 0～5VDC
Wetted surface material: SUS316L, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Actuator system: Thermal
Surface treatment: Machined finish
Standard fitting: 1/4in.SWL (equivalent)
Accessory: Power cord, User's manual, Written guarantee
