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Hirox Optics - High Resolution
Highest optical power: from 0,1x up to 10.000x
Multiple lighting technologies: BF / DF / POL / DIFF / UV,...
Patented HIROX rotary head: 360° motorized inspection
Z axis - Ultra Fine Steps
Motorised Z axis: 30 mm with 50 nm steps
Additional manual Z: 80 mm manual Z axis
Special design: compact or bridge system
NPS Sensors - High Precision
Wide measuring range: from 100μm up to 24.000μm
Big working distance: from 3mm up to 25mm
Various type of measurement: form, flatness, roughness,...
XY axis - High Accuracy
Wide range of movement: from 40x40 mm to 500x500 mm
Special high precision stage: 110x75mm movement
Small XY steps: from 0.1 μm
