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Resolution: 15 nm (SE), 20 nm (BSE)
Magnification: Max. 60,000x
Voltage: 1kv ~ 30kv (1/5/10/15/20/30)
Detection: SE (Secondary Electron)
BSE (Back scattered Electron)
Electron Gun: Tungsten Filament (cartridge)
Sample stage: X: 35nm, Y : 35mm, R: 360° / 3-axis (Manual)
* X,Y,R Motorized - option
* Tilt : 0~45° - option
Sample (Diameter/Height): 70mm/30mm
Vacuum System: High & Low Vacuum
