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Resolution: 5 nm
Magnification: Max. 100,000x
Voltage: 1kv ~ 30kv (1/5/10/15/20/30)
Detection: SE (Secondary Electron)
* BSE (Option)
Electron Gun: Tungsten Filament (cartridge)
Sample stage: X, Y : 40mm, R: 360°
Z: 0~35mm, T: 0~45°
- 5-axis (Manual)
Sample (Diameter/Height): 80mm/35mm
Vacuum System: High Vacuum
