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Pumping speed (L/s): 2000
Ultimate pressure (Pa): 5×10-7
Max pre-pressure (Pa): 100
For N2 : 108
For H2 : 1×104
Motor speed (r / min): 24000
Start time min: ＜10
Volume of lubricant oil: 260ml
Installation ways: vertical
Cooling ways: Water cooling
Cooling water consumption: 90L/h
Cooling water temperature: ＜24℃
Baking temperature : 100±10 ℃
Air inlet diameter mm: DN250
Air outlet diameter mm: KF40
