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Pumping speed (L/s): 600
Ultimate pressure (Pa): 5×10-6
Max pre-pressure (Pa): 4000
For N2 : 107
For H2 : 1×103
Resistant atmosphere pressure or not: yes
Motor speed: 24000 r/min
Start time min: ＜10
Volume of lubricant oil: No
Installation ways: Arbitrary
Cooling ways: Water cooling
Cooling water consumption: 90L/h
Cooling water temperature: ＜24℃
Baking temperature : 100±10 ℃
Air inlet diameter mm: DN160
Air outlet diameter mm: KF40
