INSIZE SPM-7000 Surface Profile Measuring Machine (0.5 ~ 10 mm/s)

X axis measuring range: 100 mm

X axis resolution: 0.1 µm

X axis straightness: 0.8 µm / 100 mm

X axis moving speed: 0.5 ~ 10 mm/s

Z axis measuring range: ±20 mm

Z axis resolution: 0.1 µm

Z axis moving speed: 0.5 ~ 20 mm/s

Linear accuracy: ±(1.5 + |0.08H|) µm, H is measuring height in mm

Angular measuring accuracy: ±2′

Arc measuring accuracy: ±(2 + R/6) µm, R is 2 ~ 10 mm standard ball

Radius of probe tip: 25 µm

Moving direction: backward

Measuring unit: mm / inch

Traceable angle: 72° (upward), 87° (downward)

Drive mode: motor

Travel of Z axis: 320 mm

Dimension (L × W × H): 600 × 400 × 920 mm

Power supply: 220 ±5% V, 50 Hz

Net weight: 131 kg

Datasheet