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Measuring Range (X/Y/Z): X: 300 mm; Y: 200 mm; Z: 75 mm
Lens Field of View:
High Precision Measurement Mode: 26x18mm
Wide FOV Measurement Mode: Φ100
Repeatative Accuracy:
High Precision Measurement Mode: ±1.5 μm
Wide FOV Measurement Mode: ±3 μm
Min. Display Unit: 0.1 μm
Measurement Accuracy:
High Precision Measurement Mode:
+ Not Connected: ±1.5 μm
+ Connected: ±2+L/150μm
Wide FOV Measurement Mode:
+ Not Connected: ±3 μm
+ Connected: ±3+L/150μm
Instrument Weight: 45 kg
Optical System:
Camera: 1" 20MP Black & White x2
Lens: Double Magnification Double Telecentric Lens
Surface Light: Two-Ring Adjustable Light Source
Back Light: Green Parallel Bottom Light
Display: 12.1" LCD Display (XGA: 1280×800)
C1 Controller: CPU: i5, SSD: 500G, RAM: 16G
Power Supply: 220V ±10%, 50Hz
Operation Environment: Temp: 20±3°C; Humidity: 30–80% (No Condensation); Vibration <0.002g, 15Hz
Dimensions (L×W×H) mm: 600×510×650
