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Throughput: 50 wafers/h with 16 profile measurement points, notch measurement and diameter measurement
MTBF: 1000 h
MTTR: 1 h
Accuracy (Radii): ± 1 μm (standard deviation 1 μm)
Accuracy (Half angles): ± 0.2° (standard deviation 0.05°)
Accuracy (Blunt lengths): ± 2 μm (standard deviation 1 μm)
Accuracy (Facet lengths): ± 2 μm (standard deviation 1 μm)
Profile deformation: > 5 μm
Control interface: Ethernet
Input voltage: 88 to 264 VAC, 47 to 63 Hz
CDA: 0.6 MPa (87 psi)
Vacuum: 68 kPa (9.8 psi)
Operating temperature: 20 to 24°C
Sensor types: LS3 (laser class 3)
Diameters: 12 (150/200 mm)
