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X/Y axis travel: 600*500mm
Z axis travel: Effective space is 245mm, focusing stroke is 200mm, work distance is 95mm
Mental table size: 800*700mm
Glass table size: 700*600 mm
Drive type X/Y/Z axis precision linear guide, grinding ball screw drive.
Optical scale resolution: X/Y/Z axis 0.0005mm(0.5μm)
Measure accuracy: ≤3μm+L/200 reapeatability accuracy: ≤3μm+L/200
Z axis high performance servo motor, double closed loop control system.
Camera: Japanese SONY CCD video magnification 30-230X
Len: high definition zoom lens/Continuous magnification 0.7-4.5X
Can match: 0.5X objective lens, total magnification:15-115X
Can match: 2X objective lens, total magnification:60-460X
Light system: Surface light and projection light, cold light, long life, brightness adjustable.
Machine external dimension: 1300*1600*1650
Weight: 2000 kg
