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Main unit
Measuring range (X×Y×Z): 23.62"x25.59"x9.84"(600×650×250mm)
Performance
Accuracy E1:
X, Y axes (image): (1.5+3L/1000) μm
Z axis (image): (1.5+4L/1000) μm
Accuracy E2:
XY plane (image): (2+4L/1000) μm
Resolution: 0.1μm
TAF Z-axis resolution: 0.3μm
Operating temperature range: 20±1ºC
Main equipment and features
Imaging Device: B&W CCD
Illumination Unit
Co-axial Light: Color LED
Transmitted Light: Blue LED
PRL: Color LED (quadrant)
Observation unit: PPT 1X-2X-6X
