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Accuracy: E0, MPE from: (1,7+0,3L/100) µm
Width: 1,082
Depth: 1548 mm
Height: 2,185
Mass: 955.0
E0,MPE: With SP25M: (1,7+4L/1000) µm;
With TP200: (1,9+4L/1000) µm;
With TP20: (2,2+4L/1000) µm;
L = measured length [mm]
Max. drive speed: 519 mm/s (3-axis)
3D Acceleration: 2,309 mm/s2
Air supply: Pressure = 0,4
Range: 500 x 700 x 400
Comments: Anti vibration stand
Loading Height: 545
Digital step: 0.1 µm
