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Drive method: Auto focus equipped, X, Y axis: manual; Z axis: motor-operated
Measuring range (X×Y×Z): 300×170×150 mm
Resolution/Scale unit: 0.1 µm / Linear encoder
Vision measuring accuracy :
+ X axis, Y axis: (2.2 + 0.02L /1000) µm
+ Z axis: (4.5 + 0.006L /1000) µm
Accuracy guaranteed temperature: 20±1ºC
Observation unit: 7X zoom (8 steps) interchangeable objective lenses (1X objective 0.5X - 3.5X; 1.5X objective 0.75X - 5.25X; 2X objective 1X - 7X)
Image detection method: 3 megapixel, CMOS color camera (1/2 in)
Illumination:
+ Transmitted light: White LED
+ Co-axial light: White LED
+ Ring light: 4-quadrant white LED
