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Measuring range (X×Y×Z): 400 x 400 x 250 mm
Max. stage loading: 30 kg
Main unit mass (Including the special sub-base): 640 kg
Vision measuring accuracy:
+ EUX,MPE/EUY,MPE = (0.8+2L/1000) µm
+ EUZ,MPE = (1.5+2L/1000) µm
+ EUXY,MPE = (1.4+3L/1000) µm
TP measuring accuracy: EX,MPE/EY,MPE/EZ,MPE= (1.7+3L/1000) µm
Resolution of scale: 0.02 µm
LAF Repeatability: σ≤ 0.8
Illumination unit: Contour illumination: White LED
Vertical surface illumination: White LED
PRL: White LED
Observation unit: Programmable power turret 1X-2X-6X
Tracking Auto Focus device: Yes
Thermal compensation function: Automatic
