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Factory option: - Tracking Auto Focus (TAF)
Measuring range (X×Y×Z): 400 x 400 x 200 mm
Vision measuring accuracy:
+ E1X,E1Y = (0.25+L/1000) µm
+ E1Z (50 mm stroke) = (1.0+2L/1000) µm
+ E1Z (Full stroke) = (1.5+2L/1000) µm
+ E2XY = (0.5+2L/1000)
Resolution of scale: 0.01 µm
LAF Repeatability: σ≤ 0.8
Illumination unit: Contour illumination: Halogen; Vertical surface illumination: Halogen; PRL: Halogen
Observation unit: Programmable power turret 1X-2X-6X
Tracking Auto Focus device: Yes
