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Measuring range [mm]:
+ Vision: 16x16x10" (400×400×250)
+ Common to vision touch probe: 13x16x10 " (334×400×250)
Observation unit*: Programmable power turret 1X-2X-6X
Tracking Auto Focus device: Yes
Illumination unit:
+ Contour illumination: White LED
+ Surface illumination: White LED
+ PRL : White LED
Resolution of scale [µm]: 0.02
Vision measuring accuracy [µm]:
+ EUX/EUY, MPE: (0.8 + 2L/1000)
+ EUXY, MPE: (1.4 + 3L/1000)
+ EUZ, MPE: (1.5 + 2L/1000)
TP measuring accuracy [µm]: EX, MPE/EY, MPE/EZ, MPE: (1.7 + 3L/1000)
LAF Repeatability [µm]: σ≤0.8
Temperature compensation function: Manual
