Measuring range [mm]:
+ Vision: 16x16x10" (400×400×250)
+ Common to vision touch probe: 13x16x10" (334×400×250)
Observation unit*: Programmable power turret 1X-2X-6X
Illumination unit:
+ Contour illumination: White LED
+ Surface illumination: White LED
+ PRL : White LED
Resolution of scale [µm]: 0.1
Vision measuring accuracy [µm]:
+ EUX/EUY, MPE: (1.5 + 3L/1000)
+ EUXY, MPE: (2.0 + 4L/1000)
+ EUZ, MPE: (1.5 + 4L/1000)
TP measuring accuracy [µm]: EX, MPE/EY, MPE/EZ, MPE: (1.8 + 3L/1000)
Temperature compensation function: Manual