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Measuring range (common to vision and UMAP):
X-axis × Y-axis: 11.22x15.75" (285×400mm)
Z-axis:
6.89" (175mm): UMAP101/103
7.09" (180mm): UMAP107/110
7.28" (185mm): UMAP130
Measuring Accurancy:
E1X, E1Y : (0.8+2L/1000)µm
E1Z : (1.5+2L/1000) µm
Repeatability: UMAP 101/103/107- s = 0.1 µm; UMAP 110/130- s = 0.15 µm
