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Digital Communication: Serial UART, TTL level
Measurement Range: 1 x 10^-5 to 760 Torr
1 x 10^-5 to 1000 mbar
1 x 10^-3 to 1 × 10+5 Pascal
Operating Temperature: 5° to 40°C (41° to 104°F)
Maximum Bakeout Temperature: 130°C (266°F)
Storage Temperature: -10° to 55°C (14° to 131°F)
Analog Output: 0.5 VDC - 4.5 VDC
Power Requirements: +5 VDC (±2%), 45 mA
MicroPirani Accuracy: 5% (typical measuring accuracy from 1E-3 to 100 Torr Nitrogen pressure measured at 25°C)
Exposed Materials: Silicon, SiO2, SiN4, Epoxy, Gold
Weight: 9 grams (Electronics Module)
Set Point Configuration: 3 open collector outputs, 50 mA sink current
Units: Torr, mbar, Pascal
