MKS LIQUOZON-VariO3 LIQUOZON® Ozonated Water Delivery System (3-90 ppm, 2-140 lpm)
Manufacturer: MKS Model: LIQUOZON-VariO3 - Contact
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Hanoi city: (024) 35.381.269
Danang city: (023) 63.747.711
Bac Ninh city: (0222)730.39.68
HCM city: (028) 38.119.636
Ozone Concentration: 3-90 ppm
Flow Rate: 2-140 lpm
Feed Gas: O2
Dopant Gas: CO2
Wetted Surfaces: Liquid: PFA, PTFE, quartz glass
Gas: 316L stainless steel, PFA, PTFE
Control Interfaces: Binary in/out, RS232/RS485, analog 4 - 20 mA in/out, USB
Dimensions: 1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
Weight: 315-400 kg, depending on configuration
Compliance: CE, SEMI F47, SEMI S2
Details
- Quality Engagement
- Easy change and return
- Delivery Avaliable
- Favorable payment