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Full Scale Flow Range: 5 to 50,000 sccm (N2 equivalent)
Maximum Inlet Pressure: 150 psig
Normal Operating Pressure Differential: 10 to 5000 sccm; 10 to 40 psid
10000 to 20000 sccm; 15 to 40 psid
10000 to 20000 sccm; 15 to 40 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure: 1000 psig
Burst Pressure: 1500 psig
Control Range: 2% to 100% of Full Scale
Typical Accuracy: ±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale
Repeatability: ±0.3% of Reading
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: < 0.05% of Full Scale/°C
Span Temperature Coefficient: < 0.08% of Reading/°C
Inlet Pressure Coefficient: < 0.02% of Reading/psi
Typical Settling Time: < 750 msec., typical above 5% Full Scale
Warm-up Time: 30 minutes
Operating Temperature: 10° to 50°C
Storage Humidity: 0 to 95% Relative Humidity, non-condensing
Storage Temperature: -20° to 80°C
Temperature Display: 0 to 100°C
Temperature Accuracy: ±2°C
Temperature Resolution: 0.1°C
Display: 4 digits for value, 4 characters for unit
Pressure Display: 0 to 100 psia
Pressure Readout Units: psia, kPA
Pressure Accuracy: 1% Full Scale
Pressure Resolution: 0.1 psia
Valve Seat Material: PTFE (Teflon)
Weight: 3 lbs (1.4 kg)
Compliance: CE
For specific range please check the attachment below!
