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Resolution: VP Mode 3 nm, 3.4 nm @ 30 kV SE VP mode with LaB6, W
Acceleration Voltage: 0.2 to 30 kV
Probe Current: 0.5 pA to 5 μA
Magnification: < 5 – 1,000,000×
Field of View: 6 mm at Analytical Working Distance (AWD)
Chamber Dimensions: 420 mm (Ø) × 330 mm (h)
5-Axes Motorized Specimen Stage:
X = 130 mm, Y = 130 mm,
Z = 50 mm or 80 mm
T = -10° to 90º, R = 360º (continuous)
Maximum Specimen Height: 210 mm
