ZEISS EVO 25 Electron Microscopy

Resolution: VP Mode 3 nm, 3.4 nm @ 30 kV SE VP mode with LaB6, W

Acceleration Voltage: 0.2 to 30 kV

Probe Current: 0.5 pA to 5 μA

Magnification: < 5 – 1,000,000×

Field of View: 6 mm at Analytical Working Distance (AWD)

Chamber Dimensions: 420 mm (Ø) × 330 mm (h)

5-Axes Motorized Specimen Stage:

X = 130 mm, Y = 130 mm,

Z = 50 mm or 80 mm

T = -10° to 90º, R = 360º (continuous)

Maximum Specimen Height: 210 mm

Datasheet