ZEISS EVO18 Scanning Electron Microscope (SEM)

Resolution:

3 nm (2 nm) @ 30 kV SE and W (LaB6)

4 nm @ 30 kV VP mode

20 nm (9 nm) @ 1 kV SE and W (LaB6)

Acceleration Voltage: 0.2 to 30 kV

Probe Current: 0.5 pA to 5 µA

Magnification: < 5 - 1,000,000x

Field of View: 6 mm at the Analytical Working Distance (AWD)

X-ray Geometry: 8.5 mm AWD and 35° take-off angle

OptiBeam* Modes: Resolution, Depth, Analysis, Field of Fisheye

Pressure Range: 10 – 400 Pa

Available Detectors:

ETSE – Everhart-Thornley Secondary Electron Detector (supplied as standard)

BSD – Five Segment Diode Backscattered Electron Detector (supplied as standard)

VPSE – Variable Pressure Secondary Electron Detector

SCD – Specimen Current Detector

EDS – Energy Dispersive Spectrometer

WDS – Wavelength Dispersive Spectrometer

CL - Cathodoluminescence Detector

STEM - Scanning Transmission Electron Microscopy Detector

Chamber Dimensions: 365 mm (Ø) x 275 mm (h)

5-Axes Motorised Compucentric Specimen Stage:

X = 125 mm

Y = 125 mm

Z = 50 mm motorized (maximum sample height extends to 145 mm with Z, tilt and rotate module removed)

T = -10 to 90°

R = 360° (continuous)

Stage control by mouse, joystick or control panel

Future Assured Upgrade Path Options: BeamSleeve

Image Framestore:

Resolution: Up to 32k x 24k at scan speed 2 and higher

Signal acquisition by integrating and averaging

Image Display:

High quality flat panel

Capable of dual channel display

System Control:

SmartSEM** GUI operated by mouse and keyboard

Multilingual Windows® operating system

Utility Requirements:

100 – 230 V, 50 or 60 Hz single phase

No water cooling requirement

Joystick, US Keyboard, US control panel and mouse supplied

Datasheet