ZEISS Gemini SEM 560 Electron Microscopy

Resolution:

0.6 nm @ 30 kV (STEM)

0.7 nm @ 15 kV

1.0 nm @ 1 kV TD

1.2 nm @ 1kV

Probe Current: 3 pA - 40 nA ((100 nA configuration also available)

Maximum field of view in high resolution mode: 5 mm at 5 kV and WD = 8.5 mm

Magnification: 8 – 2,000,000

5-axes motorized eucentric specimen stage:

X = 130 mm; Y = 130 mm

Z = 50 mm

T = -4º to 70º

R = 360º (continuous)

Specimen size: up to 179 mm in diameter for the full stage travel range of 130 mm.

Additional stage options available on request

Datasheet