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Fitting: 1/4” VCR
Communications / Connector : RS485 (S-Protocol)/Analog (Input 0-5V ; Output 0-5V); 15-Pin Male D (Brooks® Protocol)
Performance:
Full Scale Flow Range (N2Eq.): 3 sccm to 55 slm
Flow Accuracy: ±1% S.P. 35 - 100%, ±0.35% F.S. 2 - 35%
Repeatability & Reproducibility: <±0.2% S.P.
Linearity: ±0.5% F.S. (included in accuracy)
Response Time (Settling Time): Normally Closed Valve <1 sec. (within 2% for steps 0 - 10 through 0 - 100%)
Control Range: 2 - 100%
Number of Bins: 11 bins
Valve Shut Down: <1% of F.S.
Zero Stability: <±0.5% F.S. per year
Pressure Coefficient: 0.03% per psi (0 - 50 psi N2)
Attitude Sensitivity: <0.25% span change @ 90°C after rezeroing (N2 @ 50 psi)
Auto shut-off: The Auto Shut-off feature closes the GF80 valve when the set point drops below 1.5% of full scale
Available Gases: MultiFlo™ Capable
Ratings
Operating Temperature Range: 5 - 50°C (41 - 122 °F)
Maximum Operating Pressure1 150 psig (10 bar)
Differential Pressure Range:
3 - 860 sccm = 7 - 45 psid,
861 - 7200 sccm = 15 - 45 psid,
7201 - 50000 sccm = 25 - 45 psid
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
Leak Integrity (external): 1x10-10 atm. cc/sec He
For more details, see datasheet.
