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Performance
F.S. Flow Ranges: 3 sccm - 55 slm
Flow Accuracy: ±1% S.P. >35 - 100%,
±0.35% F.S. 2 - 35%
Repeatability & Reproducibility: 5 - 100% = ±0.15% of S.P.
2 - 5% = ±0.015% of F.S.
Linearity: ±0.5% F.S. (included in accuracy)
Response Time (Settling Time) N.C. Valve: 300 ms (3 - 860 sccm)
400 ms (861 - 7200 sccm)
500 ms (7201 - 30000 sccm)
< 700 ms (30001 - 55000 sccm)
N.O. Valve: <1.5 sec
Pressure Insensitivity: <5% S.P. up to 5 psi/sec upstream pressure spike
Control Range: 2 - 100% (Normally Closed Valve)
3 - 100% (Normally Open Valve)
MultiFlo™: Standard
# of Bins: 11 bins
Valve Shut Down (N.C. Valve): Standard Hastelloy Valve: <1% of F.S
Zero Leak-by Valve: SH40 - SH41 <0.02% F.S.
SH42 - SH50 <0.005% F.S.
Valve Shut Down (N.O. Valve): 2% of F.S.
Zero Stability: <+0.5% F.S. per year
Temperature Coefficient: Zero: 0.005% F.S. per °C; Span: 0.05% F.S. per °C
Ratings
Operating Temperature Range: 10 - 50°C
Differential Pressure Range: 3 - 860 sccm = 7 - 45 psid
861 - 7200 sccm = 10 - 45 psid
7201 - 55000 sccm = 15 - 45 psid
Maximum Operating Pressure: 100 psia max
Proof Pressure: 140 psia max
Design Pressure: 170 psia max
Burst Pressure: 500 psia max
Leak Integrity (External): 1x10⁻¹⁰ atm. cc/sec He
For more details, see datasheet.
